Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12255150 | CMP safe alignment mark | Jheng-Si SU, Kung-Ming Liu, Tzuyi Hsieh, Feng-Inn Wu | 2025-03-18 |
| 8992287 | Slurry supply system for CMP process | Sheng-Chen Wang, Feng-Inn Wu, Chih-Hung Tsai, Te-Chia Hsu | 2015-03-31 |