Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6436851 | Method for spin coating a high viscosity liquid on a wafer | Bao-Ru Young, Kun-I Lee | 2002-08-20 |
| 6308576 | Method for determining stress effect on a film during scrubber clean | Renn-Shyan Yeh, Tzu-Yu Lin, Chao-Hsin Chang | 2001-10-30 |
| 6153497 | Method for determining a cause for defects in a film deposited on a wafer | Renn-Shyan Yeh, Chao-Hsin Chang, Chih-Chien Hung | 2000-11-28 |