Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468908 | Al-Cu alloy sputtering method with post-metal quench | Cheng-Shien Chen, Li CHEN, Chih-Min Wen, Chih-Ching Lin | 2002-10-22 |
| 6100202 | Pre deposition stabilization method for forming a void free isotropically etched anisotropically patterned doped silicate glass layer | Been-Hon Lin, Bing-Huei Peng | 2000-08-08 |
| 6005277 | ARC layer enhancement for reducing metal loss during via etch | Chwen-Ming Liu, Jiann-Jong Wang | 1999-12-21 |