Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6297162 | Method to reduce silicon oxynitride etch rate in a silicon oxide dry etch | Syun-Ming Jang, Yuan-Hung Chiu | 2001-10-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6297162 | Method to reduce silicon oxynitride etch rate in a silicon oxide dry etch | Syun-Ming Jang, Yuan-Hung Chiu | 2001-10-02 |