Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9367655 | Topography-aware lithography pattern check | I-Chang Shih, Chung-Min Fu, Ying-Chou Cheng, Yung-Fong Lu, Feng-Yuan Chiu | 2016-06-14 |
| 8952329 | 3D image profiling techniques for lithography | I-Chang Shih, Yi-Jie Chen, Chia-Cheng Chang, Feng-Yuan Chiu, Ying-Chou Cheng +2 more | 2015-02-10 |
| 8910092 | Model based simulation method with fast bias contour for lithography process check | I-Chang Shih, Feng-Yuan Chiu, Ying-Chou Cheng, Ru-Gun Liu | 2014-12-09 |