Issued Patents All Time
Showing 26–42 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11605728 | Semiconductor device structure with inner spacer layer | Han-Yu Lin, Fang-Wei Lee, Tze-Chung Lin, Li-Te Lin, Pinyen Lin | 2023-03-14 |
| 11592749 | Laser interference fringe control for higher EUV light source and EUV throughput | Keh-Jeng Chang, Chan-Lon Yang | 2023-02-28 |
| 11594616 | Field effect transistor with negative capacitance dielectric structures | Keh-Jeng Chang, Chan-Lon Yang | 2023-02-28 |
| 11502199 | Independent control of stacked semiconductor device | Keh-Jeng Chang, Chan-Lon Yang | 2022-11-15 |
| 11437371 | Field effect transistors with negative capacitance layers | Chan-Lon Yang, Keh-Jeng Chang | 2022-09-06 |
| 11351635 | Apparatus and method for directional etch with micron zone beam and angle control | Li-Te Lin, Pinyen Lin | 2022-06-07 |
| 11335606 | Power rails for stacked semiconductor device | Keh-Jeng Chang, Chan-Lon Yang | 2022-05-17 |
| 11282711 | Plasma-assisted etching of metal oxides | Keh-Jeng Chang, Chan-Lon Yang | 2022-03-22 |
| 11276604 | Radical-activated etching of metal oxides | Chan-Lon Yang, Keh-Jeng Chang, Perng-Fei Yuh | 2022-03-15 |
| 11201229 | Structure and formation method of semiconductor device with metal gate stack | Li-Te Lin | 2021-12-14 |
| 11201243 | Nanowire stack GAA device and methods for producing the same | Han-Yu Lin, Chun-Yu Chen, Chih-Ching Wang, Fang-Wei Lee, Tze-Chung Lin +3 more | 2021-12-14 |
| 11152491 | Method for forming semiconductor device structure with inner spacer layer | Han-Yu Lin, Fang-Wei Lee, Tze-Chung Lin, Li-Te Lin, Pinyen Lin | 2021-10-19 |
| 11150559 | Laser interference fringe control for higher EUV light source and EUV throughput | Keh-Jeng Chang, Chan-Lon Yang | 2021-10-19 |
| 11114547 | Field effect transistor with negative capacitance dieletric structures | Keh-Jeng Chang, Chan-Lon Yang | 2021-09-07 |
| 11107904 | Inner spacer formation in multi-gate transistors | Han-Yu Lin, Tze-Chung Lin, Fang-Wei Lee, Fo-Ju Lin, Li-Te Lin +1 more | 2021-08-31 |
| 11094796 | Transistor spacer structures | — | 2021-08-17 |
| 8658541 | Method of controlling trench microloading using plasma pulsing | Gene Lee, Liming Yang | 2014-02-25 |