Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10852635 | Compact modeling for the negative tone development processes | Chun-Chieh Kuo, Lawrence S. Melvin, III | 2020-12-01 |
| 8812145 | Modeling mask errors using aerial image sensitivity | Yongfa Fan | 2014-08-19 |
| 8631359 | System and technique for modeling resist profile change sensitivity at different heights | Xin Zheng, Chun-Chieh Kuo | 2014-01-14 |
| 8355807 | Method and apparatus for using aerial image sensitivity to model mask errors | Yongfa Fan | 2013-01-15 |
| 8255838 | Etch-aware OPC model calibration by using an etch bias filter | Jing Xue | 2012-08-28 |
| 8250498 | Method and apparatus for calibrating a photolithography process model by using a process window parameter | Xin Zheng, Kyo Il Koo | 2012-08-21 |
| 8181128 | Method and apparatus for determining a photolithography process model which models the influence of topography variations | Lawrence S. Melvin, III | 2012-05-15 |
| 7934176 | Method and apparatus for determining a process model that models the impact of a CAR/PEB on the resist profile | Chun-Chieh Kuo, Lawrence S. Melvin, III | 2011-04-26 |
| 7853919 | Modeling mask corner rounding effects using multiple mask layers | Chun-Chieh Kuo, Lawrence S. Melvin, III | 2010-12-14 |
| 7743357 | Method and apparatus for determining a process model that models the impact of CAR/PEB on the resist profile | Chun-Chieh Kuo, Lawrence S. Melvin, III | 2010-06-22 |
| 7727687 | Method and apparatus for determining whether a sub-resolution assist feature will print | Lawrence S. Melvin, III, Martin Drapeau | 2010-06-01 |
| 7707539 | Facilitating process model accuracy by modeling mask corner rounding effects | Chun-Chieh Kuo, Lawrence S. Melvin, III | 2010-04-27 |
| 7491479 | Compensating for effects of topography variation by using a variable intensity-threshold | Lawrence S. Melvin, III | 2009-02-17 |
| 7454739 | Method and apparatus for determining an accurate photolithography process model | Chun-Chieh Kuo, Lawrence S. Melvin, III | 2008-11-18 |