Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 9484186 | Modeling and correcting short-range and long-range effects in E-beam lithography | Hua Song, James P. Shiely | 2016-11-01 | $31,652,000 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 9484186 | Modeling and correcting short-range and long-range effects in E-beam lithography | Hua Song, James P. Shiely | 2016-11-01 | $31,652,000 |