Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9824909 | Chuck, in particular for use in a mask aligner | Sven Hansen, Katrin SCHINDLER | 2017-11-21 |
| 6373272 | Arrangement for the testing of semiconductor structures | Reinhard Welsch, Claus Dietrich, Dietmar Runge | 2002-04-16 |