Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11630026 | Method and test system for assessing the quality of a multi-channel micro- and/or subwavelength-optical projection unit | Isabel Agireen, Wilfried Noell, Sophiane Tournois, Susanne Westenhoefer | 2023-04-18 |
| 9824909 | Chuck, in particular for use in a mask aligner | Sven Hansen, Thomas Huelsmann | 2017-11-21 |