Issued Patents All Time
Showing 26–37 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6540838 | Apparatus and concept for minimizing parasitic chemical vapor deposition during atomic layer deposition | Carl Galewski | 2003-04-01 |
| 6503330 | Apparatus and method to achieve continuous interface and ultrathin film during atomic layer deposition | Thomas E. Seidel, Carl Galewski | 2003-01-07 |
| 6475910 | Radical-assisted sequential CVD | — | 2002-11-05 |
| 6451119 | Apparatus and concept for minimizing parasitic chemical vapor deposition during atomic layer deposition | Carl Galewski | 2002-09-17 |
| 6451695 | Radical-assisted sequential CVD | — | 2002-09-17 |
| 6305314 | Apparatus and concept for minimizing parasitic chemical vapor deposition during atomic layer deposition | Carl Galewski | 2001-10-23 |
| 6200893 | Radical-assisted sequential CVD | — | 2001-03-13 |
| 6189238 | Portable purge system for transporting materials | Mindaugas F. Dautartas | 2001-02-20 |
| 6090442 | Method of growing films on substrates at room temperatures using catalyzed binary reaction sequence chemistry | Jason W. Klaus, Steven M. George | 2000-07-18 |
| 6037268 | Method for etching tantalum oxide | Mindaugas F. Dautartas | 2000-03-14 |
| 6007685 | Deposition of highly doped silicon dioxide films | John B. MacChesney, Aza E. Mishkevich, Henry M. O'Bryan, Jr., Eliezer M. Rabinovich | 1999-12-28 |
| 5949944 | Apparatus and method for dissipating charge from lithium niobate devices | William J. Minford | 1999-09-07 |