Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9283647 | Centrifugal barrel polishing machine and centrifugal barrel polishing method | Tomoyuki Kobayashi | 2016-03-15 |
| 7502127 | Sensor device and stage device | Wei Gao, Satoshi Kiyono, Toru Hirata, Yoji Watanabe, Kennichi Makino | 2009-03-10 |
| 7257902 | Stage device | Wei Gao, Satoshi Kiyono, Makoto Tano | 2007-08-21 |
| 7239939 | Substrate transfer device | Hidehiko Mori, Kazutoshi Sakaki | 2007-07-03 |
| 7082674 | Method for winding a single coil of a coil unit for a linear motor | Hidehiko Mori, Yasushi Koyanagawa | 2006-08-01 |
| 6965115 | Airtight processing apparatus, airtight processing method, and electron beam processing apparatus | Naoki Yasumitsu, Eiichi Hiraoka | 2005-11-15 |
| 6925355 | Substrate transfer device | Hidehiko Mori, Kazutoshi Sakaki | 2005-08-02 |
| 6817104 | X-Y stage apparatus | Makoto Kaneko, Hiroshi Morita, Yasuhito Nakamori, Masanobu Sugimine | 2004-11-16 |
| 6668202 | Position control system and velocity control system for stage driving mechanism | Kenichi Makino, Masayuki Yamamoto | 2003-12-23 |
| 6644584 | Single coil of coil unit for linear motor, method and device for winding and forming the same, and method for forming and fabricating coil unit | Hidehiko Mori, Yasushi Koyanagawa | 2003-11-11 |
| 6584367 | Stage position control method and stage position control apparatus capable of improving positioning precision | Kenichi Makino, Hidehiko Mori | 2003-06-24 |
| 6564110 | Position controlling apparatus capable of reducing the effect of disturbance | Kenichi Makino, Hidehiko Mori | 2003-05-13 |
| 6165054 | Double side grinding apparatus and double side polishing apparatus | Kohzo Abe, Sho Isobe, Kazutoshi Hara, Ryuzo Masaki, Akio Iwase +1 more | 2000-12-26 |
| 5056030 | Apparatus for carrying out decoupling control of a T-die | — | 1991-10-08 |
| 4990078 | Structure of lip drive portion of T-die | — | 1991-02-05 |