Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6504615 | Optical instrument for measuring shape of wafer | Nobuaki Iguchi | 2003-01-07 |
| 6343980 | Flattening machine | Yutaka Koma | 2002-02-05 |
| 6165054 | Double side grinding apparatus and double side polishing apparatus | Sho Isobe, Yoshiyuki Tomita, Kazutoshi Hara, Ryuzo Masaki, Akio Iwase +1 more | 2000-12-26 |
| 5995226 | Optical apparatus for measuring profiles of a wafer | Nobuaki Iguchi | 1999-11-30 |