Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7239939 | Substrate transfer device | Hidehiko Mori, Yoshiyuki Tomita | 2007-07-03 |
| 6925355 | Substrate transfer device | Hidehiko Mori, Yoshiyuki Tomita | 2005-08-02 |
| 6789457 | Gas pressure actuator capable of stably driving and controlling its slider, and method for controlling the gas pressure actuator | Fuminori Makino | 2004-09-14 |
| 6779432 | Servo circuit for use with air pressure actuator capable of improving speed control performance | — | 2004-08-24 |