Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8517363 | XY stage device, semiconductor inspection apparatus, and semiconductor exposure apparatus | Yasushi Koyanagawa, Ryuta Nakajima | 2013-08-27 |
| 7959141 | Stage apparatus | — | 2011-06-14 |
| 6789457 | Gas pressure actuator capable of stably driving and controlling its slider, and method for controlling the gas pressure actuator | Kazutoshi Sakaki | 2004-09-14 |