Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11072508 | Control apparatus | Kiyoto Miyoshi, Takatora Ando, Keita Suzuki, Shinya Matsubara, Taishi Hitomi +1 more | 2021-07-27 |
| 8517363 | XY stage device, semiconductor inspection apparatus, and semiconductor exposure apparatus | Fuminori Makino, Yasushi Koyanagawa | 2013-08-27 |
| 8019448 | Stage device | Hidehiko Mashimo | 2011-09-13 |
| 7997567 | Stage apparatus | — | 2011-08-16 |
| 7946767 | Hydrostatic bearing and stage apparatus | Tsuyoshi Nomoto, Takuya Hosobata | 2011-05-24 |