Issued Patents All Time
Showing 26–41 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5672252 | Method and apparatus for fabrication of dielectric film | Shigenori Hayashi, Kazuki Komaki, Takeshi Kamada, Takashi Deguchi, Ryoichi Takayama +1 more | 1997-09-30 |
| 5662965 | Method of depositing crystalline carbon-based thin films | Masahiro Deguchi, Takashi Hirao | 1997-09-02 |
| 5470398 | Dielectric thin film and method of manufacturing same | Munehiro Shibuya, Takeshi Kamada, Takashi Hirao | 1995-11-28 |
| 5431733 | Low vapor-pressure material feeding apparatus | Munehiro Shibuya, Takeshi Kamada, Takashi Hirao | 1995-07-11 |
| 5336361 | Method of manufacturing an MIS-type semiconductor device | Akiyoshi Tamura | 1994-08-09 |
| 5203925 | Apparatus for producing a thin film of tantalum oxide | Munehiro Shibuya, Takeshi Kamada, Takashi Hirao, Hiroshi Nishizato | 1993-04-20 |
| 5202562 | High sensitive element analyzing method and apparatus of the same | Masataka Koga, Toyoharu Okumoto, Masamichi Tsukada, Yukio Okamoto | 1993-04-13 |
| 5185523 | Mass spectrometer for analyzing ultra trace element using plasma ion source | Yukio Okamoto, Takayuki Ono, Tetuya Shinden | 1993-02-09 |
| 5141885 | Method of fabrication of thin film transistors | Akihisa Yoshida, Takashi Hirao | 1992-08-25 |
| 5130537 | Plasma analyzer for trace element analysis | Yukio Okamoto, Takashi Iino, Satoshi Shimura, Masamichi Tsukada, Hiromi Yamashita | 1992-07-14 |
| 5070027 | Method of forming a heterostructure diode | Yoshio Mito, Takashi Hirao, Yoshitake Yasuno, Ryuma Hirano | 1991-12-03 |
| D307398 | Atomic absorption spectrophotometer | Shouji Umemoto, Masamichi Tsukada | 1990-04-24 |
| 4867562 | Atomic absorption spectrophotometer | Konosuke Oishi, Masamichi Tsukada, Toyoharu Okumoto, Hayato Tobe | 1989-09-19 |
| 4800174 | Method for producing an amorphous silicon semiconductor device using a multichamber PECVD apparatus | Shinichiro Ishihara, Takashi Hirao | 1989-01-24 |
| 4645341 | Double polarized light beam spectrophotometer of light source modulation type | Masataka Koga, Konosuke Oishi | 1987-02-24 |
| 4624045 | Method of making thin film device | Shinichiro Ishihara, Takashi Hirao, Koshiro Mori, Masaharu Ono | 1986-11-25 |