Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10617997 | Apparatus for exhaust gas abatement under reduced pressure | Masashi Maeda, Michihiko Yanagisawa, Tsutomu Tsukada, Hiroshi Imamura | 2020-04-14 |
| 6984540 | Surface acoustic wave device and method for producing the same | Mitihiko Takase, Michio Okajima, Kentaro Setsune, Kouzou Murakami, Kunihiro Fujii | 2006-01-10 |
| 6597486 | Semiconductor laser and optical system having a collimator lens | Naotaro Nakata | 2003-07-22 |
| 6577386 | Method and apparatus for activating semiconductor impurities | Masatoshi Kitagawa, Masao Uchida, Makoto Kitabatake, Tsuneo Mitsuyu | 2003-06-10 |
| 6518494 | Silicon structure, method for producing the same, and solar battery using the silicon structure | Munehiro Shibuya, Masatoshi Kitagawa, Yuuji Mukai | 2003-02-11 |
| 6320689 | Semiconductor laser and optical system having a collimator lens | Naotaro Nakata | 2001-11-20 |
| 6255201 | Method and device for activating semiconductor impurities | Masatoshi Kitagawa, Masao Uchida, Makoto Kitabatake, Tsuneo Mitsuyu | 2001-07-03 |
| 6207282 | Substrate surface treatment method | Masahiro Deguchi, Makoto Kitabatake, Takashi Hirao | 2001-03-27 |
| 6127211 | Method of manufacturing transistor | Takashi Hirao, Toru Fukumoto, Kazuyasu Adachi | 2000-10-03 |
| 6123774 | Apparatus and method of manufacturing semiconductor element | Takashi Hirao, Masatoshi Kitagawa | 2000-09-26 |
| 5976919 | Apparatus and method of manufacturing semiconductor element | Takashi Hirao, Masatoshi Kitagawa | 1999-11-02 |
| 5814194 | Substrate surface treatment method | Masahiro Deguchi, Makoto Kitabatake, Takashi Hirao | 1998-09-29 |
| 5766342 | Method for forming silicon film and silicon film forming apparatus | Munehiro Shibuya, Masatoshi Kitagawa, Yuji Mukai, Takashi Hirao | 1998-06-16 |
| 5141885 | Method of fabrication of thin film transistors | Masatoshi Kitagawa, Takashi Hirao | 1992-08-25 |
| 4859908 | Plasma processing apparatus for large area ion irradiation | Kentaro Setsune, Takashi Hirao | 1989-08-22 |