Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9768062 | Method for forming low parasitic capacitance source and drain contacts | Jorge A. Kittl, David Seo, Kim Changhwa, Rwik Sengupta, Mark S. Rodder | 2017-09-19 |
| 7446048 | Dry etching apparatus and dry etching method | — | 2008-11-04 |