Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8685855 | Tray for CVD and method for forming film using same | Takashi Nakayama, Takayuki Kihara | 2014-04-01 |
| 7960253 | Thin silicon wafer with high gettering ability and production method thereof | Takaaki Shiota, Takashi Nakayama | 2011-06-14 |