Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7960253 | Thin silicon wafer with high gettering ability and production method thereof | Takashi Nakayama, Tomoyuki Kabasawa | 2011-06-14 |
| 7632349 | Silicon wafer surface defect evaluation method | Wataru Itou, Takeshi Hasegawa | 2009-12-15 |
| 7615467 | Method for manufacturing SOI wafer | Yasuhiro Oura | 2009-11-10 |
| 7582540 | Method for manufacturing SOI wafer | Yasuhiro Oura | 2009-09-01 |
| 7122082 | Silicon wafer and manufacturing method thereof | Yoshinobu Nakada | 2006-10-17 |
| 6682597 | Silicon wafer, and heat treatment method of the same and the heat-treated silicon wafer | Hiroshi Koya, Hisashi Furuya, Yoji Suzuki, Yukio Muroi | 2004-01-27 |
| 6663708 | Silicon wafer, and manufacturing method and heat treatment method of the same | Etsuro Morita, Yoshihisa Nonogaki, Yoshinobu Nakada, Hisashi Furuya, Hiroshi Koya +3 more | 2003-12-16 |
| 6428619 | Silicon wafer, and heat treatment method of the same and the heat-treated silicon wafer | Hiroshi Koya, Hisashi Furuya, Yoji Suzuki, Yukio Muroi | 2002-08-06 |