| 12400909 |
Method for producing support substrate for bonded wafer, and support substrate for bonded wafer |
Daisuke HIEDA, Hiroaki ISHIZAKI, Toshiyuki Isami, Koudai Moroiwa |
2025-08-26 |
| 11462409 |
Epitaxial silicon wafer, and method for manufacturing epitaxial silicon wafer |
Tadashi Kawashima, Katsuya Ookubo |
2022-10-04 |
| 10867791 |
Method for manufacturing epitaxial silicon wafer and epitaxial silicon wafer |
Tadashi Kawashima, Kenichi Mizogami |
2020-12-15 |
| 10253429 |
Method for manufacturing epitaxial silicon wafer |
Tadashi Kawashima |
2019-04-09 |
| 9755022 |
Epitaxial silicon wafer having reduced stacking faults |
Tadashi Kawashima, Masayuki Shinagawa, Gou Uesono |
2017-09-05 |
| 9425264 |
Method for growing an epitaxial film on a phosphorous-doped silicon wafer |
Tadashi Kawashima, Masayuki Shinagawa, Gou Uesono |
2016-08-23 |
| 8956927 |
Method of manufacturing epitaxial silicon wafer and epitaxial silicon wafer manufactured by the method |
Tadashi Kawashima |
2015-02-17 |