Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400909 | Method for producing support substrate for bonded wafer, and support substrate for bonded wafer | Daisuke HIEDA, Hiroaki ISHIZAKI, Toshiyuki Isami, Koudai Moroiwa | 2025-08-26 |
| 11462409 | Epitaxial silicon wafer, and method for manufacturing epitaxial silicon wafer | Tadashi Kawashima, Katsuya Ookubo | 2022-10-04 |
| 10867791 | Method for manufacturing epitaxial silicon wafer and epitaxial silicon wafer | Tadashi Kawashima, Kenichi Mizogami | 2020-12-15 |
| 10253429 | Method for manufacturing epitaxial silicon wafer | Tadashi Kawashima | 2019-04-09 |
| 9755022 | Epitaxial silicon wafer having reduced stacking faults | Tadashi Kawashima, Masayuki Shinagawa, Gou Uesono | 2017-09-05 |
| 9425264 | Method for growing an epitaxial film on a phosphorous-doped silicon wafer | Tadashi Kawashima, Masayuki Shinagawa, Gou Uesono | 2016-08-23 |
| 8956927 | Method of manufacturing epitaxial silicon wafer and epitaxial silicon wafer manufactured by the method | Tadashi Kawashima | 2015-02-17 |