| 12038454 |
MEMS inertial sensor with high resilience to the phenomenon of stiction |
Francesco RIZZINI, Gabriele Gattere |
2024-07-16 |
$20,101,000 |
| 11519932 |
MEMS inertial sensor with high resilience to the phenomenon of stiction |
Francesco RIZZINI, Gabriele Gattere |
2022-12-06 |
$22,057,000 |
| 10894713 |
Temperature-compensated micro-electromechanical device, and method of temperature compensation in a micro-electromechanical device |
Ernesto Lasalandra, Angelo Merassi |
2021-01-19 |
$34,803,000 |
| 10578505 |
Process for manufacturing a MEMS pressure sensor, and corresponding MEMS pressure sensor |
Lorenzo Baldo, Enri Duqi |
2020-03-03 |
$17,430,000 |
| 10353020 |
Manufacturing method for integrated multilayer magnetoresistive sensor |
Dario Paci, Benedetto Vigna |
2019-07-16 |
$12,074,000 |
| 10048148 |
Process for manufacturing a MEMS pressure sensor, and corresponding MEMS pressure sensor |
Lorenzo Baldo, Enri Duqi |
2018-08-14 |
$5,367,000 |
| 9878903 |
Method of manufacturing a temperature-compensated micro-electromechanical device |
Ernesto Lasalandra, Angelo Merassi |
2018-01-30 |
$14,089,000 |
| 9513310 |
High-sensitivity, z-axis micro-electro-mechanical detection structure, in particular for an MEMS accelerometer |
Leonardo Baldasarre, Alessandro Tocchio |
2016-12-06 |
$9,098,000 |
| 9470526 |
Microelectromechanical gyroscope with rotary driving motion and improved electrical properties |
Luca Coronato, Gabriele Cazzaniga |
2016-10-18 |
$4,445,000 |
| 9423474 |
Integrated multilayer magnetoresistive sensor and manufacturing method thereof |
Dario Paci, Benedetto Vigna |
2016-08-23 |
$6,333,000 |
| 9377482 |
Detection structure for a Z-axis resonant accelerometer |
Claudia Comi, Alberto Corigliano |
2016-06-28 |
$3,416,000 |
| 9340413 |
Integrated acoustic transducer in MEMS technology, and manufacturing process thereof |
Angelo Merassi, Luca Coronato |
2016-05-17 |
$6,967,000 |
| RE45855 |
Microelectromechanical sensor with improved mechanical decoupling of sensing and driving modes |
Luca Coronato, Alessandro Balzelli Ludovico |
2016-01-19 |
|
| RE45792 |
High sensitivity microelectromechanical sensor with driving motion |
Luca Coronato, Alessandro Balzelli Ludovico |
2015-11-03 |
|
| 9018946 |
Magnetic field sensor having anisotropic magnetoresisitive elements, with improved arrangement of magnetization elements thereof |
Dario Paci |
2015-04-28 |
$921,000 |
| 8760156 |
Integrated triaxial magnetometer of semiconductor material manufactured in MEMS technology |
Lorenzo Baldo, Francesco Procopio |
2014-06-24 |
$3,292,000 |
| 8733170 |
Temperature-compensated micro-electromechanical device, and method of temperature compensation in a micro-electromechanical device |
Ernesto Lasalandra, Angelo Merassi |
2014-05-27 |
$4,134,000 |
| 8733172 |
Microelectromechanical gyroscope with rotary driving motion and improved electrical properties |
Luca Coronato, Gabriele Cazzaniga |
2014-05-27 |
$4,134,000 |
| 8661900 |
Z-axis microelectromechanical device with improved stopper structure |
Angelo Merassi, Barbara Simoni |
2014-03-04 |
$2,961,000 |
| 8661897 |
Uniaxial or biaxial microelectromechanical gyroscope with improved sensitivity to angular velocity detection |
Luca Coronato, Gabriele Cazzaniga |
2014-03-04 |
$2,961,000 |
| 8565452 |
Integrated acoustic transducer in MEMS technology, and manufacturing process thereof |
Luca Coronato, Angelo Merassi |
2013-10-22 |
$1,970,000 |
| 8471557 |
Integrated triaxial magnetometer of semiconductor material manufactured in MEMS technology |
Lorenzo Baldo, Francesco Procopio |
2013-06-25 |
$3,391,000 |
| 8413506 |
Microelectromechanical gyroscope with rotary driving motion and improved electrical properties |
Luca Coronato, Gabriele Cazzaniga |
2013-04-09 |
$5,147,000 |
| 8312769 |
Uniaxial or biaxial microelectromechanical gyroscope with improved sensitivity to angular velocity detection |
Luca Coronato, Gabriele Cazzaniga |
2012-11-20 |
$10,183,000 |
| 8042394 |
High sensitivity microelectromechanical sensor with rotary driving motion |
Luca Coronato, Alessandro Balzelli Ludovico |
2011-10-25 |
$1,868,000 |
