{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "High sensitivity microelectromechanical sensor with rotary driving motion", "item": "https://www.patentleaderboard.com/patent/8042394"}]}
Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › High sensitivity microelectromechanical sensor with rotary driving motion

High sensitivity microelectromechanical sensor with rotary driving motion

US Patent 8042394 · Granted Oct 25, 2011

Estimated economic value: $1,868,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Anchor design with rejection of external shear force2025
Dual axis accelerometer with compensation electrodes2025
MEMS sensor with compensation of residual voltage2024
MEMS inertial sensor with high resilience to the phenomenon of stiction2024
Capacitance gap measurement2024
Robust method for gyroscope drive amplitude measurement2024
MEMS design with shear force rejection for reduced offset2023
MEMS inertial sensor with high resilience to the phenomenon of stiction2022
Out-of-plane sensing gyroscope robust to external acceleration and rotation2022
MEMS structure for offset minimization of out-of-plane sensing accelerometers2022
Robust method for tuning of gyroscope demodulation phase2021
Microelectromechanical structure with enhanced rejection of acceleration noise2021