| 10894713 |
Temperature-compensated micro-electromechanical device, and method of temperature compensation in a micro-electromechanical device |
Ernesto Lasalandra, Sarah Zerbini |
2021-01-19 |
| 9878903 |
Method of manufacturing a temperature-compensated micro-electromechanical device |
Ernesto Lasalandra, Sarah Zerbini |
2018-01-30 |
| 9815687 |
MEMS device and corresponding micromechanical structure with integrated compensation of thermo-mechanical stress |
— |
2017-11-14 |
| 9486593 |
Process for manufacturing an integrated membrane of nozzles in MEMS technology for a spray device and spray device using such membrane |
Angelo Pesci, Benedetto Vigna, Ernestino Galeazzi, Marco Mantovani |
2016-11-08 |
| 9340413 |
Integrated acoustic transducer in MEMS technology, and manufacturing process thereof |
Sarah Zerbini, Luca Coronato |
2016-05-17 |
| 9327962 |
MEMS device and corresponding micromechanical structure with integrated compensation of thermo-mechanical stress |
— |
2016-05-03 |
| 9184138 |
Semiconductor integrated device with mechanically decoupled active area and related manufacturing process |
Marco Ferrera, Marco Mantovani, Paolo Ferrari, Benedetto Vigna |
2015-11-10 |
| 9080871 |
Microelectromechanical sensor with non-conductive sensing mass, and method of sensing through a microelectromechanical sensor |
Biagio De Masi, Alberto Corigliano |
2015-07-14 |
| 8733170 |
Temperature-compensated micro-electromechanical device, and method of temperature compensation in a micro-electromechanical device |
Ernesto Lasalandra, Sarah Zerbini |
2014-05-27 |
| 8721910 |
Process for manufacturing an integrated membrane of nozzles in MEMS technology for a spray device and spray device using such membrane |
Angelo Pesci, Benedetto Vigna, Ernestino Galeazzi, Marco Mantovani |
2014-05-13 |
| 8661900 |
Z-axis microelectromechanical device with improved stopper structure |
Sarah Zerbini, Barbara Simoni |
2014-03-04 |
| 8565452 |
Integrated acoustic transducer in MEMS technology, and manufacturing process thereof |
Luca Coronato, Sarah Zerbini |
2013-10-22 |
| 8124895 |
Planar microelectromechanical device having a stopper structure for out-of-plane movements |
Mario Cortese, Viola Fulvio, Barbara Simoni, Andrea Rusconi Clerici Beltrami |
2012-02-28 |
| 7886601 |
Microelectromechanical sensor having multiple full-scale and sensitivity values |
Sarah Zerbini, Hubert Geitner, Marco Del Sarto |
2011-02-15 |
| 7793544 |
Microelectromechanical inertial sensor, in particular for free-fall detection applications |
Sarah Zerbini, Ernesto Lasalandra, Benedetto Vigna |
2010-09-14 |
| 7678599 |
Process for the fabrication of an inertial sensor with failure threshold |
Sarah Zerbini, Guido Spinola Durante, Biagio De Masi |
2010-03-16 |
| 7646582 |
Temperature-compensated micro-electromechanical device, and method of temperature compensation in a micro-electromechanical device |
Ernesto Lasalandra, Sarah Zerbini |
2010-01-12 |
| 7520171 |
Micro-electromechanical structure with self-compensation of the thermal drifts caused by thermomechanical stress |
Sarah Zerbini, Benedetto Vigna |
2009-04-21 |
| 7322242 |
Micro-electromechanical structure with improved insensitivity to thermomechanical stresses induced by the package |
Bruno Murari, Sarah Zerbini |
2008-01-29 |
| 7252002 |
Planar inertial sensor, in particular for portable devices having a stand-by function |
Sarah Zerbini, Ernesto Lasalandra, Benedetto Vigna |
2007-08-07 |
| 6928872 |
Integrated gyroscope of semiconductor material with at least one sensitive axis in the sensor plane |
Guido Durante, Sarah Zerbini |
2005-08-16 |
| 6858810 |
Sensor with failure threshold |
Sarah Zerbini, Guido Spinola Durante, Biagio De Masi |
2005-02-22 |
