Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10894713 | Temperature-compensated micro-electromechanical device, and method of temperature compensation in a micro-electromechanical device | Ernesto Lasalandra, Sarah Zerbini | 2021-01-19 |
| 9878903 | Method of manufacturing a temperature-compensated micro-electromechanical device | Ernesto Lasalandra, Sarah Zerbini | 2018-01-30 |
| 9815687 | MEMS device and corresponding micromechanical structure with integrated compensation of thermo-mechanical stress | — | 2017-11-14 |
| 9486593 | Process for manufacturing an integrated membrane of nozzles in MEMS technology for a spray device and spray device using such membrane | Angelo Pesci, Benedetto Vigna, Ernestino Galeazzi, Marco Mantovani | 2016-11-08 |
| 9340413 | Integrated acoustic transducer in MEMS technology, and manufacturing process thereof | Sarah Zerbini, Luca Coronato | 2016-05-17 |
| 9327962 | MEMS device and corresponding micromechanical structure with integrated compensation of thermo-mechanical stress | — | 2016-05-03 |
| 9184138 | Semiconductor integrated device with mechanically decoupled active area and related manufacturing process | Marco Ferrera, Marco Mantovani, Paolo Ferrari, Benedetto Vigna | 2015-11-10 |
| 9080871 | Microelectromechanical sensor with non-conductive sensing mass, and method of sensing through a microelectromechanical sensor | Biagio De Masi, Alberto Corigliano | 2015-07-14 |
| 8733170 | Temperature-compensated micro-electromechanical device, and method of temperature compensation in a micro-electromechanical device | Ernesto Lasalandra, Sarah Zerbini | 2014-05-27 |
| 8721910 | Process for manufacturing an integrated membrane of nozzles in MEMS technology for a spray device and spray device using such membrane | Angelo Pesci, Benedetto Vigna, Ernestino Galeazzi, Marco Mantovani | 2014-05-13 |
| 8661900 | Z-axis microelectromechanical device with improved stopper structure | Sarah Zerbini, Barbara Simoni | 2014-03-04 |
| 8565452 | Integrated acoustic transducer in MEMS technology, and manufacturing process thereof | Luca Coronato, Sarah Zerbini | 2013-10-22 |
| 8124895 | Planar microelectromechanical device having a stopper structure for out-of-plane movements | Mario Cortese, Viola Fulvio, Barbara Simoni, Andrea Rusconi Clerici Beltrami | 2012-02-28 |
| 7886601 | Microelectromechanical sensor having multiple full-scale and sensitivity values | Sarah Zerbini, Hubert Geitner, Marco Del Sarto | 2011-02-15 |
| 7793544 | Microelectromechanical inertial sensor, in particular for free-fall detection applications | Sarah Zerbini, Ernesto Lasalandra, Benedetto Vigna | 2010-09-14 |
| 7678599 | Process for the fabrication of an inertial sensor with failure threshold | Sarah Zerbini, Guido Spinola Durante, Biagio De Masi | 2010-03-16 |
| 7646582 | Temperature-compensated micro-electromechanical device, and method of temperature compensation in a micro-electromechanical device | Ernesto Lasalandra, Sarah Zerbini | 2010-01-12 |
| 7520171 | Micro-electromechanical structure with self-compensation of the thermal drifts caused by thermomechanical stress | Sarah Zerbini, Benedetto Vigna | 2009-04-21 |
| 7322242 | Micro-electromechanical structure with improved insensitivity to thermomechanical stresses induced by the package | Bruno Murari, Sarah Zerbini | 2008-01-29 |
| 7252002 | Planar inertial sensor, in particular for portable devices having a stand-by function | Sarah Zerbini, Ernesto Lasalandra, Benedetto Vigna | 2007-08-07 |
| 6928872 | Integrated gyroscope of semiconductor material with at least one sensitive axis in the sensor plane | Guido Durante, Sarah Zerbini | 2005-08-16 |
| 6858810 | Sensor with failure threshold | Sarah Zerbini, Guido Spinola Durante, Biagio De Masi | 2005-02-22 |