Issued Patents All Time
Showing 26–40 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8633553 | Process for manufacturing a micromechanical structure having a buried area provided with a filter | Matteo Perletti, Igor Varisco, Luca Zanotti | 2014-01-21 |
| RE41856 | Process for manufacturing high-sensitivity accelerometric and gyroscopic integrated sensors, and sensor thus produced | Paolo Ferrari, Benedetto Vigna, Pietro Montanini | 2010-10-26 |
| RE41889 | Process for manufacturing high-sensitivity accelerometric and gyroscopic integrated sensors, and sensor thus produced | Paolo Ferrari, Benedetto Vigna, Pietro Montanini | 2010-10-26 |
| 7800234 | Process for manufacturing deep through vias in a semiconductor device, and semiconductor device made thereby | Mauro Marchi, Caterina Riva | 2010-09-21 |
| 7437933 | Micro-electro-mechanical structure having electrically insulated regions and manufacturing process thereof | Guido Durante, Simone Sassolini, Mauro Marchi | 2008-10-21 |
| 6689627 | Process for manufacturing micromechanical components in a semiconductor material wafer with reduction in the starting wafer thickness | Marta Mottura, Alessandra Fischetti, Bernardino Zerbini, Mauro Bombonati | 2004-02-10 |
| 6527961 | Method of manufacturing pressure microsensors | Benedetto Vigna, Paolo Ferrari, Pietro Montanini | 2003-03-04 |
| 6395618 | Method for manufacturing integrated structures including removing a sacrificial region | Paolo Vergani, Ilaria Gelmi, Pietro Montanini, Laura Maria Castoldi | 2002-05-28 |
| 6387725 | Production method for integrated angular speed sensor device | Paolo Ferrari, Benedetto Vigna, Mario Foroni, Pietro Montanini | 2002-05-14 |
| 6331444 | Method for manufacturing integrated devices including electromechanical microstructures, without residual stress | Paolo Ferrari, Benedetto Vigna, Pietro Montanini, Laura Maria Castoldi | 2001-12-18 |
| 6209394 | Integrated angular speed sensor device and production method thereof | Paolo Ferrari, Benedetto Vigna, Aurea Cuccia, Pietro Montanini | 2001-04-03 |
| 6197655 | Method for manufacturing integrated structures including removing a sacrificial region | Pietro Montanini, Laura Maria Castoldi, Ilaria Gelmi | 2001-03-06 |
| 6184052 | Process for manufacturing high-sensitivity capacitive and resonant integrated sensors, particularly accelerometers and gyroscopes, and sensors made therefrom | Benedetto Vigna, Paolo Ferrari, Pietro Montanini | 2001-02-06 |
| 6109106 | Process for manufacturing high-sensitivity accelerometric and gyroscopic integrated sensors, and sensor thus produced | Paolo Ferrari, Benedetto Vigna, Pietro Montanini | 2000-08-29 |
| 6090638 | Process for manufacturing high-sensitivity capacitive and resonant integrated sensors, particularly accelerometers and gyroscopes, and sensors made therefrom | Benedetto Vigna, Paolo Ferrari, Pietro Montanini | 2000-07-18 |