Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11360377 | Half-tone attenuated phase shift blankmask and photomask for EUV lithography | Cheol Shin, Jong-Hwa Lee, Chul-Kyu YANG | 2022-06-14 |
| 9482940 | Blankmask and photomask | Kee-Soo Nam, Geung-Won Kang, Cheol Shin, Jong-Hwa Lee, Chul-Kyu YANG +2 more | 2016-11-01 |