| 9551925 |
Blankmask and photomask using the same |
Kee-Soo Nam, Chul-Kyu YANG, Cheol Shin, Jong-Hwa Lee, Min-Ki CHOI +2 more |
2017-01-24 |
| 9482940 |
Blankmask and photomask |
Kee-Soo Nam, Cheol Shin, Jong-Hwa Lee, Chul-Kyu YANG, Chang-Jun Kim +2 more |
2016-11-01 |
| 9389500 |
Mask blank, photomask, and method for manufacturing same |
Kee-Soo Nam, Jong-Hwa Lee, Chul-Kyu YANG, Soon-Gi KWON |
2016-07-12 |
| 9256119 |
Phase-shift blankmask and method for fabricating the same |
Kee-Soo Nam, Dong Geun Kim, Jong Won Jang, Min-Ki CHOI |
2016-02-09 |
| 9229317 |
Blankmask and method for fabricating photomask using the same |
Kee-Soo Nam, Chul-Kyu YANG, Jong-Hwa Lee, Kyu-Jin Jang |
2016-01-05 |
| 8846276 |
Blankmask and photomask using the same |
Kee-Soo Nam, Jong-Hwa Lee, Chul-Kyu YANG, Soon-Gi KWON |
2014-09-30 |
| 5444026 |
Method for manufacturing semiconductor device by forming insulator-layer to suppress bubble formation |
Chang-Kyu Kim, Myeong-beom Lee, Ji Hyun Choi, Woo-in Joung, Young Im +2 more |
1995-08-22 |
