| 11940725 |
Phase shift blankmask and photomask for EUV lithography |
Cheol Shin, Yong Dae Kim, Jong-Hwa Lee, Min-Kwang PARK, Mi-Kyung WOO |
2024-03-26 |
| 11927880 |
Phase shift blankmask and photomask for EUV lithography |
Yong Dae Kim, Min-Kwang PARK, Mi-Kyung WOO |
2024-03-12 |
| 11815801 |
Reflective type blankmask and photomask for EUV |
Cheol Shin, Jong-Hwa Lee, Gil-Woo KONG |
2023-11-14 |
| 11579521 |
Reflective type blankmask and photomask for EUV |
Cheol Shin, Jong-Hwa Lee, Gil-Woo KONG |
2023-02-14 |
| 11467485 |
Blankmask and photomask for extreme ultraviolet lithography |
Cheol Shin, Jong-Hwa Lee, Gil-Woo KONG, Gyeong-Won SEO |
2022-10-11 |
| 11435661 |
Reflective type blankmask for EUV, and method for manufacturing the same |
Gil-Woo KONG |
2022-09-06 |
| 11360377 |
Half-tone attenuated phase shift blankmask and photomask for EUV lithography |
Cheol Shin, Jong-Hwa Lee, See-Jun Jeong |
2022-06-14 |
| 10942445 |
Blankmask and photomask, and methods of fabricating the same |
Cheol Shin, Jong-Hwa Lee, Min-Ki CHOI |
2021-03-09 |
| 10036947 |
Blankmask and photomask using the same |
Kee-Soo Nam, Cheol Shin, Jong-Hwa Lee, Min-Ki CHOI, Chang-Jun Kim +1 more |
2018-07-31 |
| 10018905 |
Phase shift blankmask and photomask |
Kee-Soo Nam, Cheol Shin, Jong-Hwa Lee, Min-Ki CHOI, Chang-Jun Kim +1 more |
2018-07-10 |
| 9851632 |
Phase-shift blankmask and photomask |
Kee-Soo Nam, Cheol Shin, Jong-Hwa Lee, Min-Ki CHOI, Chang-Jun Kim +1 more |
2017-12-26 |
| 9551925 |
Blankmask and photomask using the same |
Kee-Soo Nam, Geung-Won Kang, Cheol Shin, Jong-Hwa Lee, Min-Ki CHOI +2 more |
2017-01-24 |
| 9482940 |
Blankmask and photomask |
Kee-Soo Nam, Geung-Won Kang, Cheol Shin, Jong-Hwa Lee, Chang-Jun Kim +2 more |
2016-11-01 |
| 9389500 |
Mask blank, photomask, and method for manufacturing same |
Kee-Soo Nam, Geung-Won Kang, Jong-Hwa Lee, Soon-Gi KWON |
2016-07-12 |
| 9229317 |
Blankmask and method for fabricating photomask using the same |
Kee-Soo Nam, Geung-Won Kang, Jong-Hwa Lee, Kyu-Jin Jang |
2016-01-05 |
| 8846276 |
Blankmask and photomask using the same |
Kee-Soo Nam, Geung-Won Kang, Jong-Hwa Lee, Soon-Gi KWON |
2014-09-30 |