Issued Patents All Time
Showing 26–37 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461222 | Planarizing and polishing apparatus and planarizing and polishing method | — | 2002-10-08 |
| 6440855 | Method of processing surface of workpiece and method of forming semiconductor thin layer | Yoshihiro Miyazawa | 2002-08-27 |
| 6428389 | Polishing apparatus | Hiizu Ootorii, Takaaki Kozuki | 2002-08-06 |
| 6386956 | Flattening polishing device and flattening polishing method | Takuo Ihira | 2002-05-14 |
| 6280292 | Polishing apparatus | Hiizu Ootorii, Takaaki Kozuki | 2001-08-28 |
| 6139400 | Polishing system and method with polishing pad pressure adjustment | Hiizu Ohtorii, Yasuharu Ohkawa, Yutaka Ozawa, Taiichi Kusano | 2000-10-31 |
| 6126511 | Polishing device and correcting method therefor | Hideaki Hayakawa, Takatoshi Saito, Yoshiaki Komuro | 2000-10-03 |
| 6077155 | Polishing device and correcting method therefor | Hideaki Hayakawa, Takatoshi Saito, Yoshiaki Komuro | 2000-06-20 |
| 6039631 | Polishing method, abrasive material, and polishing apparatus | Hiizu Ohtorii | 2000-03-21 |
| 5812407 | Apparatus for correcting and holding front surface of sheet | Hiizu Otorii, Nobuo Suematsu | 1998-09-22 |
| 5727111 | Optical pick-up and light detecting cover therefor | Hidehiro Kume, Kimihiro Saito, Takeshi Kubo | 1998-03-10 |
| 5681212 | Polishing device and correcting method therefor | Hideaki Hayakawa, Takatoshi Saito, Yoshiaki Komuro | 1997-10-28 |