Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8947673 | Estimating thickness based on number of peaks between two peaks in scanning white light interferometry | Heui Jae Pahk, Seong Ryong Kim, Jun Hyeok Lee | 2015-02-03 |
| 8416293 | Plasma monitoring device and method | Heung Hyun Shin | 2013-04-09 |
| 8279447 | Method for measuring thickness | Heui Jae Pahk, Young-Min Hwang | 2012-10-02 |
| 8199332 | Apparatus for measuring thickness | Heui Jae Pahk, Young-Min Hwang, Chang Yeol Lee, Ji Won Choi | 2012-06-12 |
| 8116555 | Vision inspection system and method for inspecting workpiece using the same | Jung-Hwan Kim, Hee-Wook You | 2012-02-14 |
| 6005669 | Non contact measuring method for three dimensional micro pattern in measuring object | Heui Jae Pahk, Sung Wook Cho | 1999-12-21 |