Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8873067 | Interferometer for TSV measurement and measurement method using same | Ki Hun LEE, Heui Jae Pahk | 2014-10-28 |
| 8416293 | Plasma monitoring device and method | Woo Jung Ahn | 2013-04-09 |