Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7615497 | Forming fine pattern of semiconductor device using three mask layers and CMP of spin-on carbon layer | Cheol Kyu Bok | 2009-11-10 |
| 7576009 | Method for forming fine pattern of semiconductor device | Ki Lyoung Lee, Cheol Kyu Bok | 2009-08-18 |
| 7550362 | Method for manufacturing semiconductor device | Cheol Kyu Bok | 2009-06-23 |
| 7550384 | Semiconductor device and method for forming pattern in the same | Cheol Kyu Bok | 2009-06-23 |
| 7494935 | Method for forming fine pattern of semiconductor device | Jae Chang Jung, Seung Chan Moon, Cheol Kyu Bok, Myoung Ja Min, Hee Youl Lim | 2009-02-24 |
| 7396751 | Method for manufacturing semiconductor device | Ki Lyoung Lee, Sa Ro Han Park | 2008-07-08 |
| 7314853 | Cleaning solution for photoresist and method for forming pattern using the same | Geun Su Lee, Sam Young Kim | 2008-01-01 |
| 7123362 | Method for aligning wafer | — | 2006-10-17 |