Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11651968 | Method for forming planarization layer and pattern forming method using the same | Ji Sok Lee, Sung Koo Lee | 2023-05-16 |
| 9947546 | Semiconductor integrated circuit device with a surface and method of manufacturing the same | Min Seok Son, Keun Kyu Kong, Jeong Hoon An | 2018-04-17 |
| 9796001 | Apparatus and method for removing particles present on a wafer using photoelectrons and an electric field | Si-Hyun Kim | 2017-10-24 |