Issued Patents All Time
Showing 51–64 of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6155909 | Controlled cleavage system using pressurized fluid | Francois J. Henley | 2000-12-05 |
| 6153524 | Cluster tool method using plasma immersion ion implantation | Francois J. Henley | 2000-11-28 |
| 6146979 | Pressurized microbubble thin film separation process using a reusable substrate | Francois J. Henley | 2000-11-14 |
| 6103599 | Planarizing technique for multilayered substrates | Francois J. Henley | 2000-08-15 |
| 6083324 | Gettering technique for silicon-on-insulator wafers | Francois J. Henley | 2000-07-04 |
| 6071795 | Separation of thin films from transparent substrates by selective optical processing | Timothy D. Sands, William S. Wong | 2000-06-06 |
| 6048411 | Silicon-on-silicon hybrid wafer assembly | Francois J. Henley | 2000-04-11 |
| 6033974 | Method for controlled cleaving process | Francois J. Henley | 2000-03-07 |
| 6027988 | Method of separating films from bulk substrates by plasma immersion ion implantation | Xiang Lu, Chenming Hu | 2000-02-22 |
| 6013563 | Controlled cleaning process | Francois J. Henley | 2000-01-11 |
| 6013567 | Controlled cleavage process using pressurized fluid | Francois J. Henley | 2000-01-11 |
| 6010579 | Reusable substrate for thin film separation | Francois J. Henley | 2000-01-04 |
| 5994207 | Controlled cleavage process using pressurized fluid | Francois J. Henley | 1999-11-30 |
| 5985742 | Controlled cleavage process and device for patterned films | Francois J. Henley | 1999-11-16 |