Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9718674 | Thin capping for MEMS devices | Edvard Kalvesten, Thorbjörn Ebefors | 2017-08-01 |
| 9511999 | Thin film capping | Thorbjörn Ebefors | 2016-12-06 |
| 9448401 | Via structure and method thereof | Thorbjörn Ebefors, Edvard Kalvesten, Peter Agren | 2016-09-20 |
| 8866289 | Bonding process and bonded structures | Thorbjörn Ebefors, Edward Kalvesten, Anders Olof Eriksson | 2014-10-21 |
| 8729685 | Bonding process and bonded structures | Thorbjörn Ebefors, Edward Kalvesten, Anders Olof Eriksson | 2014-05-20 |
| 8729713 | Via structure and method thereof | Thorbjörn Ebefors, Edvard Kalvesten, Peter Agren | 2014-05-20 |
| 8630033 | Via structure and method thereof | Thorbjörn Ebefors, Edvard Kalvesten, Peter Agren, Thomas Ericson | 2014-01-14 |
| 8592981 | Via structure and method thereof | Thorbjörn Ebefors, Edvard Kalvesten, Peter Agren | 2013-11-26 |
| 8485416 | Bonding process and bonded structures | Thorbjörn Ebefors, Edward Kalvesten, Anders Olof Eriksson | 2013-07-16 |
| 7560802 | Electrical connections in substrates | Edvard Kalvesten, Thorbjörn Ebefors, Pelle Rangsten, Tommy Schönberg | 2009-07-14 |
| 7172911 | Deflectable microstructure and method of manufacturing the same through bonding of wafers | Edvard Kalvesten, Thorbjörn Ebefors, H{dot over (a)}kan Westin | 2007-02-06 |
| 6055869 | Lift force fluid flow sensor for measuring fluid flow velocities | Erik Stemme, Göran Stemme, Edvard Kalvesten | 2000-05-02 |