Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9936918 | Insulation of micro structures | Thorbjörn Ebefors, Anders Olof Eriksson | 2018-04-10 |
| 9718674 | Thin capping for MEMS devices | Thorbjörn Ebefors, Niklas Svedin | 2017-08-01 |
| 9620390 | Method of making a semiconductor device having a functional capping | Thorbjörn Ebefors, Tomas Bauer | 2017-04-11 |
| 9607915 | Through substrate vias and device | Ulf Erlesand | 2017-03-28 |
| 9448401 | Via structure and method thereof | Thorbjörn Ebefors, Peter Agren, Niklas Svedin | 2016-09-20 |
| 9362139 | Method of making a semiconductor device having a functional capping | Thorbjörn Ebefors, Tomas Bauer | 2016-06-07 |
| 9312217 | Methods for making a starting substrate wafer for semiconductor engineering having wafer through connections | Tomas Bauer, Thorbjörn Ebefors | 2016-04-12 |
| 8729713 | Via structure and method thereof | Thorbjörn Ebefors, Peter Agren, Niklas Svedin | 2014-05-20 |
| 8637351 | Methods for making micro needles and applications thereof | Thorbjörn Ebefors, Thierry Corman | 2014-01-28 |
| 8630033 | Via structure and method thereof | Thorbjörn Ebefors, Peter Agren, Niklas Svedin, Thomas Ericson | 2014-01-14 |
| 8592981 | Via structure and method thereof | Thorbjörn Ebefors, Peter Agren, Niklas Svedin | 2013-11-26 |
| 8308960 | Methods for making micro needles and applications thereof | Thorbjörn Ebefors, Thierry Corman | 2012-11-13 |
| 7560802 | Electrical connections in substrates | Thorbjörn Ebefors, Niklas Svedin, Pelle Rangsten, Tommy Schönberg | 2009-07-14 |
| 7207227 | Pressure sensor | Pelle Rangsten, Marianne Mechbach | 2007-04-24 |
| 7172911 | Deflectable microstructure and method of manufacturing the same through bonding of wafers | Thorbjörn Ebefors, Niklas Svedin, H{dot over (a)}kan Westin | 2007-02-06 |
| 7067345 | Method of joining components | Göran Stemme, Frank Niklaus | 2006-06-27 |
| 7017420 | Miniaturized pressure sensor | Patrik Melv{dot over (a)}s, Göran Stemme | 2006-03-28 |
| 6973835 | Pressure sensor | Pelle Rangsten, Marianne Mechbach | 2005-12-13 |
| 6548322 | Micromachined gas-filled chambers and method of microfabrication | Göran Stemme | 2003-04-15 |
| 6124145 | Micromachined gas-filled chambers and method of microfabrication | Göran Stemme | 2000-09-26 |
| 6055869 | Lift force fluid flow sensor for measuring fluid flow velocities | Erik Stemme, Göran Stemme, Niklas Svedin | 2000-05-02 |