Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5798016 | Apparatus for hot wall reactive ion etching using a dielectric or metallic liner with temperature control to achieve process stability | Gottlieb S. Oehrlein, David Vender, Ying Zhang | 1998-08-25 |
| 5637237 | Method for hot wall reactive ion etching using a dielectric or metallic liner with temperature control to achieve process stability | Gottlieb S. Oehrlein, David Vender, Ying Zhang | 1997-06-10 |