Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6110637 | Photoresists which are suitable for producing sub-micron size structures | Recai Sezi, Rainer Leuschner, Michael Sebald, Siegfried Birkle, Hellmut Ahne | 2000-08-29 |
| 5703186 | Mixed polymers | Recai Sezi, Hellmut Ahne, Siegfried Birkle, Eberhard Kuehn, Rainer Leuschner +2 more | 1997-12-30 |
| 5616667 | Copolymers | Recai Sezi, Hellmut Ahne, Siegfried Birkle, Eberhard Kuehn, Rainer Leuschner +2 more | 1997-04-01 |
| 5384220 | Production of photolithographic structures | Recai Sezi, Rainer Leuschner, Michael Sebald, Siegfried Birkle, Hellmut Ahne | 1995-01-24 |