Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6075358 | Device in a semiconductor manufacturing installation in particular for integrated circuits | Wolfgang Hetzel, Norbert Martin Haueis, Friedrich Wanninger, Georg Schlaffer, Peter Eigenstetter +1 more | 2000-06-13 |