Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12157702 | Ceramic substrate and electrostatic chuck | — | 2024-12-03 |
| 11952316 | Composite green sheet and ceramic member | Michio Horiuchi | 2024-04-09 |
| 11735458 | Ceramic mixture paste, porous body, electrostatic chuck, and substrate fixing device | — | 2023-08-22 |
| 11658015 | Ceramic structure, electrostatic chuck and substrate fixing device | — | 2023-05-23 |
| 11417558 | Ceramics substrate, method of manufacturing the same, electrostatic chuck, substrate fixing device, and semiconductor device package | — | 2022-08-16 |
| 11370709 | Ceramic member | Michio Horiuchi | 2022-06-28 |
| 11177152 | Ceramic substrate containing aluminum oxide and electrostatic chuck having electrode containing tungsten with oxides | — | 2021-11-16 |
| 10957574 | Electrostatic chuck and substrate fixing apparatus | — | 2021-03-23 |
| 10861732 | Electrostatic chuck and substrate fixing device | Masaya Tsuno, Shigeaki Suganuma | 2020-12-08 |
| 9997450 | Wiring substrate and semiconductor device | Kiyoshi Oi | 2018-06-12 |