Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6884154 | Method for apparatus for polishing outer peripheral chamfered part of wafer | Kazutoshi Mizushima, Yasuhiro Sekine, Makoto Suzuki, Kazuya Tomii | 2005-04-26 |
| 6074442 | Method of separating slice base mounting member from wafer and jig adapted therefor | Masayuki Kobayashi, Shigetoshi Shimoyama | 2000-06-13 |
| 5806137 | Washing of wafers and wafer washing and drying apparatus | Hiromitsu Ishi, Masayuki Kobayashi, Shigetoshi Shimoyama | 1998-09-15 |