Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5686364 | Method for producing substrate to achieve semiconductor integrated circuits | Akio Kanai, Shinji Tanaka | 1997-11-11 |
| 5336634 | Dielectrically isolated substrate and a process for producing the same | Masatake Katayama, Makoto Sato, Yutaka Ohta, Mitsuru Sugita | 1994-08-09 |
| 5240883 | Method of fabricating SOI substrate with uniform thin silicon film | Takao Abe, Masatake Katayama, Akio Kanai, Masatake Nakano | 1993-08-31 |
| 5183783 | Method for production of dielectric-separation substrate | Yutaka Ohta, Masatake Katayama | 1993-02-02 |
| 5124274 | Method for production of dielectric-separation substrate | Yutaka Ohta, Masatake Katayama | 1992-06-23 |