Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5298111 | Automatic wafer transfer apparatus and a method for transferring wafers and an etching drum | Tatsuya Yamamoto, Shinji Sato | 1994-03-29 |
| 5282289 | Scrubber apparatus for cleaning a thin disk work | Makoto Tsukada, Hideo Kudo, Masayuki Yamada, Isao Uchiyama | 1994-02-01 |
| 5246528 | Automatic wafer etching method and apparatus | Shinji Sato | 1993-09-21 |
| 5174067 | Automatic wafer lapping apparatus | Hiromasa Hashimoto | 1992-12-29 |
| 5126113 | Apparatus for producing czochralski-grown single crystals | Hirotoshi Yamagishi, Kouji Mizuishi | 1992-06-30 |