Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11940391 | Defect inspection apparatus, method for inspecting defect, and method for manufacturing photomask blank | Ryusei Terashima, Tsuneo Terasawa | 2024-03-26 |
| 10781276 | Polymer, resist composition containing polymer, and method for manufacturing device using same | Satoshi Enomoto | 2020-09-22 |