Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10114280 | Titania-doped quartz glass and making method | Hisatoshi Otsuka, Tetsuji Ueda, Masanobu Ezaki | 2018-10-30 |
| 9746773 | Titania-doped quartz glass and making method | Hisatoshi Otsuka, Tetsuji Ueda, Masanobu Ezaki | 2017-08-29 |
| 9612525 | Titania-doped quartz glass and making method | Hisatoshi Otsuka | 2017-04-04 |
| 9346700 | Titania-doped quartz glass and making method | Hisatoshi Otsuka | 2016-05-24 |
| 9296636 | Titania doped quartz glass and making method | Hisatoshi Otsuka, Tetsuji Ueda, Masanobu Ezaki | 2016-03-29 |
| 9278881 | EUV lithography member, making method, and titania-doped quartz glass | Hisatoshi Otsuka, Tetsuji Ueda, Masanobu Ezaki | 2016-03-08 |
| 9067814 | Method of producing synthetic quartz glass for excimer laser | Hisatoshi Otsuka | 2015-06-30 |
| 9056785 | Nanoimprint mold-forming synthetic quartz glass and making method | Hisatoshi Otsuka | 2015-06-16 |
| 8820122 | Titania-doped quartz glass and making method | Hisatoshi Otsuka, Osamu Sekizawa, Naoki Yanagisawa | 2014-09-02 |
| 8629071 | Titania and sulfur co-doped quartz glass member and making method | Hisatoshi Otsuka | 2014-01-14 |
| 8539797 | Titania and sulfur co-doped quartz glass member and making method | Hisatoshi Otsuka | 2013-09-24 |
| 8377612 | Titania-doped quartz glass member and making method | Hisatoshi Otsuka | 2013-02-19 |
| 8105734 | Titania-doped quartz glass member and making method | Hisatoshi Otsuka | 2012-01-31 |
| 7935648 | Titania-doped quartz glass for nanoimprint molds | Hisatoshi Otsuka | 2011-05-03 |
| 7923394 | Titania-doped quartz glass for nanoimprint molds | Hisatoshi Otsuka | 2011-04-12 |
| 7849711 | Titania-doped quartz glass and making method, EUV lithographic member and photomask substrate | Motoyuki Yamada | 2010-12-14 |
| 7585598 | Titania-doped quartz glass and making method, EUV lithographic member and photomask substrate | Motoyuki Yamada | 2009-09-08 |
| 7159418 | Method of producing synthetic quartz glass | Koji Matsuo, Hisatoshi Otsuka, Kazuo Shirota | 2007-01-09 |
| 6990836 | Method of producing fluorine-containing synthetic quartz glass | Motoyuki Yamada, Hisatoshi Otsuka, Kazuo Shirota, Koji Matsuo | 2006-01-31 |