Issued Patents All Time
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10114280 | Titania-doped quartz glass and making method | Shigeru Maida, Tetsuji Ueda, Masanobu Ezaki | 2018-10-30 |
| 9746773 | Titania-doped quartz glass and making method | Shigeru Maida, Tetsuji Ueda, Masanobu Ezaki | 2017-08-29 |
| 9612525 | Titania-doped quartz glass and making method | Shigeru Maida | 2017-04-04 |
| 9346700 | Titania-doped quartz glass and making method | Shigeru Maida | 2016-05-24 |
| 9296636 | Titania doped quartz glass and making method | Shigeru Maida, Tetsuji Ueda, Masanobu Ezaki | 2016-03-29 |
| 9278881 | EUV lithography member, making method, and titania-doped quartz glass | Shigeru Maida, Tetsuji Ueda, Masanobu Ezaki | 2016-03-08 |
| 9067814 | Method of producing synthetic quartz glass for excimer laser | Shigeru Maida | 2015-06-30 |
| 9056785 | Nanoimprint mold-forming synthetic quartz glass and making method | Shigeru Maida | 2015-06-16 |
| 8820122 | Titania-doped quartz glass and making method | Shigeru Maida, Osamu Sekizawa, Naoki Yanagisawa | 2014-09-02 |
| 8650912 | Burner and method for the manufacture of synthetic quartz glass | Kazuo Shirota | 2014-02-18 |
| 8629071 | Titania and sulfur co-doped quartz glass member and making method | Shigeru Maida | 2014-01-14 |
| 8596095 | Manufacture of synthetic quartz glass ingot and synthetic quartz glass member | Kazuo Shirota, Osamu Sekizawa | 2013-12-03 |
| 8539797 | Titania and sulfur co-doped quartz glass member and making method | Shigeru Maida | 2013-09-24 |
| 8377612 | Titania-doped quartz glass member and making method | Shigeru Maida | 2013-02-19 |
| 8105734 | Titania-doped quartz glass member and making method | Shigeru Maida | 2012-01-31 |
| 7954340 | Synthetic quartz glass substrate for excimer lasers and making method | Kazuo Shirota, Osamu Sekizawa | 2011-06-07 |
| 7935648 | Titania-doped quartz glass for nanoimprint molds | Shigeru Maida | 2011-05-03 |
| 7923394 | Titania-doped quartz glass for nanoimprint molds | Shigeru Maida | 2011-04-12 |
| 7827824 | Synthetic quartz glass substrate for excimer lasers and making method | Kazuo Shirota, Osamu Sekizawa | 2010-11-09 |
| 7232778 | Synthetic quartz glass ingot, synthetic quartz glass, and methods of manufacture thereof | Kazuo Shirota | 2007-06-19 |
| 7159418 | Method of producing synthetic quartz glass | Koji Matsuo, Kazuo Shirota, Shigeru Maida | 2007-01-09 |
| 6990836 | Method of producing fluorine-containing synthetic quartz glass | Shigeru Maida, Motoyuki Yamada, Kazuo Shirota, Koji Matsuo | 2006-01-31 |
| 6761951 | Synthetic quartz glass blank | Kazuo Shirota, Akira Fujinoki, Hiroyuki Nishimura, Takayuki SHIMAKAWA | 2004-07-13 |
| 6705115 | Synthetic quartz glass and production process | Koji Matsuo, Kazuo Shirota | 2004-03-16 |
| 6541405 | Synthetic quartz glass member for excimer laser and method of making | Kazuo Shirota, Akira Fujinoki | 2003-04-01 |