Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10114280 | Titania-doped quartz glass and making method | Shigeru Maida, Hisatoshi Otsuka, Tetsuji Ueda | 2018-10-30 |
| 9746773 | Titania-doped quartz glass and making method | Shigeru Maida, Hisatoshi Otsuka, Tetsuji Ueda | 2017-08-29 |
| 9296636 | Titania doped quartz glass and making method | Shigeru Maida, Hisatoshi Otsuka, Tetsuji Ueda | 2016-03-29 |
| 9278881 | EUV lithography member, making method, and titania-doped quartz glass | Shigeru Maida, Hisatoshi Otsuka, Tetsuji Ueda | 2016-03-08 |
| 7485593 | Titania-silica glass | Masashi Kobata, Sachiko Kato | 2009-02-03 |
| 7082789 | Silica glass member for semiconductor and production method thereof | Lian Pan, Seiji Taniike | 2006-08-01 |