Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9460973 | Surface processing progress monitoring system | Rui Kato, Hiroomi Goto | 2016-10-04 |
| 9228828 | Thickness monitoring device, etching depth monitoring device and thickness monitoring method | Hiroomi Goto, Rui Kato | 2016-01-05 |
| 9007599 | Depth of hole measurement by subtracting area of two spectra separated by time | Hiroomi Goto, Rui Kato | 2015-04-14 |
| 9001337 | Etching monitor device | Hiroomi Goto, Rui Kato | 2015-04-07 |
| 7911610 | Optical measuring device | Naoji Moriya, Yukihisa Wada, Naofumi Sakauchi, Fujio Inoue, Masahiro Takebe +2 more | 2011-03-22 |
| 7760356 | Optical measuring device and method, and nanoparticle measuring method and device | Naoji Moriya, Shinichro Totoki, Yukihisa Wada, Naofumi Sakauchi, Fujio Inoue +2 more | 2010-07-20 |