Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10288561 | Gas analyzer | Hideaki KATSU, Fumiaki Otera | 2019-05-14 |
| 9460973 | Surface processing progress monitoring system | Yuzo Nagumo, Hiroomi Goto | 2016-10-04 |
| 9228828 | Thickness monitoring device, etching depth monitoring device and thickness monitoring method | Hiroomi Goto, Yuzo Nagumo | 2016-01-05 |
| 9007599 | Depth of hole measurement by subtracting area of two spectra separated by time | Hiroomi Goto, Yuzo Nagumo | 2015-04-14 |
| 9001337 | Etching monitor device | Hiroomi Goto, Yuzo Nagumo | 2015-04-07 |